SEMICONDUCTOR FACTORY AUTOMATION: TECHNOLOGY ISSUES AND MARKET FORECASTS
出 版 商：The Information Network
出版日期：2016/10/01
價 格：
USD 2,495 (Single-User License)
Chapter 1 Introduction 1-1
Chapter 2 Executive Summary 2-1
2.1 Summary of Major Issues 2-1
2.2 Summary of Market Forecasts 2-4
Chapter 3 Driving Forces 3-1
3.1 Introduction 3-1
3.2 Trend to 300/450mm Wafers 3-3
3.3 Development Costs 3-6
3.4 Single-Wafer Processing 3-7
3.5 Trends in Processing Tools 3-8
3.6 Automation Trends 3-11
3.7 Benefits of Automated Wafer Handling 3-20
Chapter 4 Software 4-1
4.1 Introduction 4-1
4.2 The Evolution of CIM 4-2
4.3 MES in Industry 4-5
4.3.1 MES Functionalities 4-13
4.3.2 MES Products 4-16
4.4 Communication Standards 4-38
4.5 Sematech CIM Framework 4-45
Chapter 5 Hardware 5-1
5.1 Introduction 5-1
5.2 Elements of Automation 5-7
5.2.1 Tool Automation 5-8
5.2.2 Intrabay Automation 5-10
5.2.3 Interbay Automation 5-12
5.2.4 Material-Control System 5-15
5.3 Flexible Automation 5-17
5.4 Reliability 5-19
5.5 Tool Issues and Trends 5-20
5.5.1 Flexible Tool Interface 5-20
5.5.2 Vacuum Robotics 5-39
5.5.3 AGV 5-48
5.5.4 Robot Control Systems 6-52
5.5.5 300-mm Wafer Transport 5-53
5.5.6 Mini-Environments and Cleanroom Issues 5-56
5.6 E-Manufacturing 5-60
Chapter 6 Market Analysis 6-1
6.1 Market Forces 6-1
6.2 Market Forecast Assumptions 6-16
6.3 Market Forecast 6-17
6.3.1 Automated Transfer Tool Market 6-17
6.3.2 Carrier Transport Market 6-28
6.3.3 MES Software Market 6-38
Chapter 7 User Issues 7-1
7.1 Current Automation Thinking 7-1
7.2 The New Factory Paradigm 7-2
7.3 The New Factory in Action 7-3
7.4 Return on Investment Considerations 7-3
7.5 Eight Symptoms of the Old Paradigm 7-5
7.6 Putting the New Paradigm to Work 7-6
List of Figures
1.1 Advanced CIM System 1-3
3.1 Automated Materials Handling System (AMHS) Framework 3-16
4.1 Evolution of CIM 4-3
4.2 Computer Integrated Fab Environment 4-6
4.3 Message Integration in CIM 4-8
4.4 Sematech CIM Framework Scope 4-47
5.1 Material-Control System 5-16
5.2 Traditional and Flexible Automated Material Handling System 5-18
5.3 Overhead Monorail Delivery - Cassette in Box, Cassette in SMIF Pod 5-23
5.4 Stocker Design and Interfaces 5-58
5.5 Layout Of a 45nm 300mm Fab 5-64
5.6 Interfaces To Factory Automation Systems 5-68
6.1 Semiconductor Equipment Utilization 6-7
6.2 Revenue Losses from Wafer Defects 6-8
6.3 Market Shares of Atmospheric Robot Suppliers 6-25
6.4 Market Shares of Vacuum Robot Suppliers 6-26
6.6 Worldwide Market Shares of Carrier Transport Suppliers 6-32
6.7 Worldwide Market of Shares MES Software Suppliers 6-43
List of Tables
5.1 Evolution Of Factory Metrics 5-58
6.1 Three-Year Savings for Automation 6-10
6.2 Cost of Alternative Automated Systems 6-11
6.3 Three-year Costs for Alternative Automated Systems 6-12
6.4 Worldwide Forecast of Automated Transfer Tools 6-20
6.5 Bill Of Materials For Atmospheric Automation Tool 6-22
6.6 Bill Of Materials For PVD Vacuum Tool 6-23
6.7 Process Tool Automation For 300mm Fabs 6-27
6.8 Worldwide Forecast of Carrier Transport Market 6-30
6.9 300mm Fab Construction Plans 6-34
6.10 Worldwide Forecast of MES Software 6-49
Chapter 2 Executive Summary 2-1
2.1 Summary of Major Issues 2-1
2.2 Summary of Market Forecasts 2-4
Chapter 3 Driving Forces 3-1
3.1 Introduction 3-1
3.2 Trend to 300/450mm Wafers 3-3
3.3 Development Costs 3-6
3.4 Single-Wafer Processing 3-7
3.5 Trends in Processing Tools 3-8
3.6 Automation Trends 3-11
3.7 Benefits of Automated Wafer Handling 3-20
Chapter 4 Software 4-1
4.1 Introduction 4-1
4.2 The Evolution of CIM 4-2
4.3 MES in Industry 4-5
4.3.1 MES Functionalities 4-13
4.3.2 MES Products 4-16
4.4 Communication Standards 4-38
4.5 Sematech CIM Framework 4-45
Chapter 5 Hardware 5-1
5.1 Introduction 5-1
5.2 Elements of Automation 5-7
5.2.1 Tool Automation 5-8
5.2.2 Intrabay Automation 5-10
5.2.3 Interbay Automation 5-12
5.2.4 Material-Control System 5-15
5.3 Flexible Automation 5-17
5.4 Reliability 5-19
5.5 Tool Issues and Trends 5-20
5.5.1 Flexible Tool Interface 5-20
5.5.2 Vacuum Robotics 5-39
5.5.3 AGV 5-48
5.5.4 Robot Control Systems 6-52
5.5.5 300-mm Wafer Transport 5-53
5.5.6 Mini-Environments and Cleanroom Issues 5-56
5.6 E-Manufacturing 5-60
Chapter 6 Market Analysis 6-1
6.1 Market Forces 6-1
6.2 Market Forecast Assumptions 6-16
6.3 Market Forecast 6-17
6.3.1 Automated Transfer Tool Market 6-17
6.3.2 Carrier Transport Market 6-28
6.3.3 MES Software Market 6-38
Chapter 7 User Issues 7-1
7.1 Current Automation Thinking 7-1
7.2 The New Factory Paradigm 7-2
7.3 The New Factory in Action 7-3
7.4 Return on Investment Considerations 7-3
7.5 Eight Symptoms of the Old Paradigm 7-5
7.6 Putting the New Paradigm to Work 7-6
List of Figures
1.1 Advanced CIM System 1-3
3.1 Automated Materials Handling System (AMHS) Framework 3-16
4.1 Evolution of CIM 4-3
4.2 Computer Integrated Fab Environment 4-6
4.3 Message Integration in CIM 4-8
4.4 Sematech CIM Framework Scope 4-47
5.1 Material-Control System 5-16
5.2 Traditional and Flexible Automated Material Handling System 5-18
5.3 Overhead Monorail Delivery - Cassette in Box, Cassette in SMIF Pod 5-23
5.4 Stocker Design and Interfaces 5-58
5.5 Layout Of a 45nm 300mm Fab 5-64
5.6 Interfaces To Factory Automation Systems 5-68
6.1 Semiconductor Equipment Utilization 6-7
6.2 Revenue Losses from Wafer Defects 6-8
6.3 Market Shares of Atmospheric Robot Suppliers 6-25
6.4 Market Shares of Vacuum Robot Suppliers 6-26
6.6 Worldwide Market Shares of Carrier Transport Suppliers 6-32
6.7 Worldwide Market of Shares MES Software Suppliers 6-43
List of Tables
5.1 Evolution Of Factory Metrics 5-58
6.1 Three-Year Savings for Automation 6-10
6.2 Cost of Alternative Automated Systems 6-11
6.3 Three-year Costs for Alternative Automated Systems 6-12
6.4 Worldwide Forecast of Automated Transfer Tools 6-20
6.5 Bill Of Materials For Atmospheric Automation Tool 6-22
6.6 Bill Of Materials For PVD Vacuum Tool 6-23
6.7 Process Tool Automation For 300mm Fabs 6-27
6.8 Worldwide Forecast of Carrier Transport Market 6-30
6.9 300mm Fab Construction Plans 6-34
6.10 Worldwide Forecast of MES Software 6-49
